Product features

  • Minimized purge volume of only 1,4 cm³
  • Capillary tube allows purging into the cylinder valve
  • Metal-to-metal seal to atmosphere using metal diaphragms made of Hastelloy C276
  • All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE or PVDF respectively
  • Fully functional even when valves are evacuated
  • Minimum particle generation, as no parts are exposed to friction and no spring is in the gas wetted area
  • Embedded soft seat seal made of PCTFE or PVDF permits frequent operation without loss of tightness
  • Modular design for easy replacement of internal parts
  • Clearly legible position indication (on/off)
  • High surface quality
  • 100 % Helium-leak-tested
  • Assembly in cleanroom class ISO 5.0
Technical data

Other gas wetted parts:

Valve seat:

stainles steel 1.4404 
(SS 316L)
Hastelloy C276

stainles steel 1.4404
(SS 316L)
Surface roughness
Ra ≤ 0,25 µm
Ra ≤ 0,18 µm
Leak rate 
to atmosphere:
via seat:

< 1 x 10-9 mbar l/s He
< 1 x 10-6 mbar l/s He
Pressure range
Manual valve:
Pneumatic valve:

max. 300 bar
25 / 100 / 200 / 300 bar
Cv-valve 0,24 (kv = 0,2)
Nominal size
DN 4
Cylinder connection - acc. to DIN 477
  depending on gas type
- acc. to other standards
  (e.g. BS, AFNOR, UNI)
  upon request