Pressure control planels MP3

Pressure control planels MP3

Product features

  • Pressure control panels for semiconductor gases  from quality 6.0
  • Waste gas valve
  • Manual (pneumatic) process gas (EMO-) valve 
  • Purge gas valve
  • Check valve to prevent process gas from flowing back into the puge gas line
  • Pre-filter
  • Pressure regulator
  • Burst disc
  • Contact pressure gauge for burst disc monitoring
  • Relief valve
  • Filter for particle-free process gas supply
  • Process gas line shut-off valve 
  • System (low pressure) vent valve
  • Shut-off valve for leak test or vacuum test
  • Vacuum connector
  • All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
  • 100 % helium-leak-tested
  • Assembly in cleanroom class 100/10
Technical data

Other gas wetted parts:

Valve seat and stem:

stainless steel 1.4404 ESU (SS 316L remelted)
Hastelloy C276

stainless steel 1.4404 ESU (SS 316L remelted)
Surface roughness
Ra ≤ 0,25 µm
Ra ≤ 0,18 µm
Leak rate 
to atmosphere:
via seat:

< 1 x 10-9 mbar l/s He
< 1 x 10-6 mbar l/s He
Cv-value 0,24 (kv = 0,2)
Temperature range -20°C to +70°C